{"attachments":[],"project":{"id":"6a66b787-1bfa-4f57-8eca-09fee64204b5","title":"先進矽基半導體設備關鍵技術研發專案計畫","title_normalized":"先進矽基半導體設備關鍵技術研發專案計畫","sponsor":"","agency":"國科會工程處","kind":"grant","taxonomy":["製造與材料"],"region":"台灣","deadline":"2026-02-25T00:00:00Z","starts_at":"2025-12-31T00:00:00Z","announced_at":null,"budget":"","eligibility":"申請機構／計畫主持人資格須符合國科會補助專題研究計畫作業要點之規定","summary":"本專案旨在落實半導體設備國產化、提升自主研發能力，聚焦前段製程、3DIC先進封裝及矽基檢測三大核心設備領域。鼓勵學研跨領域團隊與國內設備商或法人單位合作，利用既有機台進行技術驗證，開發具國際競爭力的國產設備關鍵技術，完善半導體產業鏈自主供應體系。","url":"https://cbi.nstc.gov.tw/Page/46B01E024222DBEC/1ec6e55f-8bf9-4659-9b2c-9d32c864ff68","url_status":"ok","url_checked_at":"2026-11-05T10:15:24.175985+01:00","source_id":null,"snapshot_id":"dcaf398b-4a2a-4611-a391-6a6d97781946","spec_id":null,"lifecycle":"open","first_seen_at":"2026-09-09T01:27:45.959793+02:00","last_verified_at":"2026-09-09T01:27:46.014567+02:00","created_at":"2026-09-09T01:27:45.960886+02:00","updated_at":"2026-11-05T10:15:24.180485+01:00"}}