CHIPS Incentives Program – Facilities for Semiconductor Materials and Manufacturing Equipment
Agency
Agency: National Institute of Standards and Technology
Assistance Listings
Assistance Listings: 11.037 -- CHIPS Incentives Program
Last Updated
Last Updated: May 13, 2026
Description
The CHIPS Incentives Program aims to catalyze long-term economically sustainable growth in the domestic semiconductor industry in support of U.S. economic and national security. This is the second Notice of Funding Opportunity under this program and seeks applications for projects for the construction, expansion, or modernization of commercial facilities for semiconductor materials and manufacturing equipment.
For more information, additional resources, and instructions on how to apply, please visit chips.gov. Note that all applications must be submitted through the CHIPS Incentives Portal at https://applications.chips.gov. If you have any questions on how to apply, please email apply@chips.gov.
Eligibility
Eligible applicants
- Other (under Miscellaneous)
Additional information
An applicant must be a “covered entity” to receive CHIPS Incentives. For purposes of this NOFO, a “covered entity” means a nonprofit entity; a private-sector entity; a consortium of private-sector entities; or a consortium of nonprofit, public, and private-sector entities with a demonstrated ability to substantially finance, construct, expand, or modernize a facility relating to the fabrication, assembly, testing, advanced packaging, production, or research and development of semiconductors, materials used to manufacture semiconductors or semiconductor manufacturing equipment.
Grantor contact information
Description: Misty Roosa Management Analyst Email: apply@chips.gov
Documents
| File name | Description | Last updated |
|---|---|---|
| CHIPS_-_Facilities_for_Semiconductor_Materials_and_Manufacturing_Equipment_NOFO.pdf | 2023-NIST-CHIPS-SMME-01 | Sep 27, 2023 08:40 PM UTC |
| 2023-NIST-CHIPS-SMME-01-Amendment.pdf | 2023-NIST-CHIPS-SMME-01 Amendment | Oct 16, 2025 08:46 PM UTC |
Link to additional information
CHIPS Application Portal
Closing
Closing: November 1, 2026
Application process
This site is a work in progress. Go to www.grants.gov to apply, track application status, and subscribe to updates.
Award
- Program Funding: $--
- Expected awards: --
- Award Minimum: $--
- Award Maximum: $--
Funding opportunity number
Funding opportunity number: 2023-NIST-CHIPS-SMME-01
Cost sharing or matching requirement
Cost sharing or matching requirement: No
Funding instrument type
Funding instrument type: Cooperative agreement
Opportunity Category
Opportunity Category: Discretionary
Opportunity Category Explanation
Opportunity Category Explanation: --
Category of Funding Activity
Category of Funding Activity: Science technology and other research and development
Category Explanation
Category Explanation: --
History
- Version: 10
- Posted date: September 29, 2023
- Archive date: December 1, 2026